Highly sensitive ultrasound detection using nanofabricated polymer micro-ring resonators

Lee, Youngseop; Zhang, Hao F.; Sun, Cheng

doi:10.1186/s40580-023-00378-2

Nano Convergence

Table 1 Summary of nanofabrication methods of polymer MRRs for optical ultrasound detectors and their key parameters

From: Highly sensitive ultrasound detection using nanofabricated polymer micro-ring resonators

Fabrication method	Substrate	Core material	Detector diameter	Waveguide dimension (width × height)	Q-factor	Working wavelength	Frequency bandwidth	NEP	PA imaging resolution	Application	Year [Refs]
NIL SiO₂ on Si mold	SiO₂ on Si	PS	60 μm (racetrack)	2.3 μm x 1.8 μm	1.0 × 10³	1.55 μm	10 MHz	N/A	N/A	US	2004 [49]
	SiO₂ on Si	PS	95 μm	2.4 μm x 1.85 μm	6.0 × 10²	1.55 μm	40 MHz	150 kPa	N/A	US	2007 [37]
	SiO₂ on Si	PS	100 μm	2 μm x 2 μm	6.0 × 10³	1.55 μm	90 MHz	230 Pa	N/A	US	2008 [50]
	SiO₂ on Si	PS	100 μm	2 μm x 2 μm	5.0 × 10³	1.55 μm	70 MHz	4.1 kPa	Lateral: 150 μm Axial: 90 μm	PAT	2008 [51]
	SiO₂ on Si	PS	100 μm	2 μm x 2 μm	6.0 × 10³	1.55 μm	16 MHz	111.4 Pa	Lateral: 209 μm Axial: 81 μm	PAT	2009 [52]
	SiO₂ on Si	PS	100 μm	2 μm x 2 μm	6.0 × 10³	1.55 μm	74 MHz	200 Pa	Lateral: 146 μm Axial:50 μm	PAT	2011 [57]
	Quartz	PS	100 μm	2 μm x 2 μm	5.0 × 10³	1.55 μm	51 MHz	N/A	Transverse:750 μm Radial: 21 μm	PA endoscopy	2011 [53]
NIL Si mold	SiO₂ on Si	PS	90 μm	N/A	1.5 × 10⁵	1.55 μm	74 MHz	88 Pa	N/A	US	2011 [28]
	SiO₂ on Si	PS	60 μm 40 μm	1 μm x 1.4 μm	4.0 × 10⁵ 7.0 × 10⁴	780 nm	74 MHz	21.4 Pa 100 Pa	Axial: 75 μm Axial: 50 μm	PAT	2011 [29]
	SiO₂ on Si	PS	40 μm	1 μm x 1.4 μm	7.0 × 10⁴	780 nm	74 MHz	100 Pa	Lateral: 55 μm Axial:50 μm	PAT	2011 [57]
	SiO₂ on Si	PS	60 μm	1 μm x 1.4 μm	3.0 × 10⁵	780 nm	74 MHz	29 Pa	Lateral: 5 μm Axial: 8 μm	PAM	2011 [58]
	SiO₂ on Si	PS	60 μm	1 μm x 1.4 μm	3.0 × 10⁵	780 nm	74 MHz	29 Pa	Lateral: 17.5 μm Axial: 20 μm	PAM	2012 [59]
	SiO₂ on Si	PS	95 μm	2.4 μm x 1.85 μm	N/A	1.55 μm	28 MHz	N/A	Lateral: 305 μm Axial: 169 μm	PA-US	2012 [61]
	SiO₂ on Si	PS	60 μm	1 μm x 1.4 μm	1.3 × 10⁵	780 nm	350 MHz	105 Pa	Lateral: N/A Axial: 2.7 μm	PAM	2014 [60]
EBL	Quartz	SU-8	60 μm	0.8 μm x 0.8 μm	1.0 × 10⁴	780 nm	140 MHz	6.8 Pa	Lateral: N/A Axial: 5.3 μm	PAM	2014 [30]
	Quartz	SU-8	60 μm	0.8 μm x 0.8 μm	4.8 × 10³	780 nm	250 MHz	352 Pa	Tangential: 15.7 μm radial: 4.5 μm Axial: 16 μm	PA endoscopy	2014 [33]
	Quartz	SU-8	60 μm	0.8 μm x 0.8 μm	1.0 × 10⁴	780 nm	280 MHz	6.8 Pa	Lateral: 0.73 μm Axial: 2.12 μm	Multimodal PAM	2015 [32]
MPL	Quartz	IP-Dip	60 μm	4 μm (diameter)	3.4 × 10³	1.55 μm	10 MHz	N/A	N/A	US	2017 [46]
sNIL PDMS mold	Quartz	PS	80 μm	0.8 μm x 0.8 μm	1.4 × 10⁵	780 nm	166 MHz	0.49 Pa	Axial: 3.57 μm	PAM	2019 [34]
sNIL PDMS mold	Quartz	PS	80 μm	0.8 μm x 0.8 μm	4.6 × 10⁴	780 nm	23 MHz	81 Pa	Lateral: 114 μm Axial :57 μm	PACT	2022 [35]

N/A: not available. US: ultrasound detection

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