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Nano Convergence
Figure 1 | Nano Convergence

Figure 1

From: Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers

Figure 1

Compilation of exemplary 3D contours in a thin PMMA film enabled by the TASTE method. The SEM micrographs (angled views and cross sections) depict refined PMMA topographies after exposure of pre-patterned PMMA to high energy electrons and subsequent thermal annealing. Achievable contours comprise (a-c) binary, stepped, sloped, convex and concave structures, as well as (d-f) hybrid structures with specific pattern combinations. (scale bars: 1 μm).

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