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Nano Convergence
Figure 2 | Nano Convergence

Figure 2

From: Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers

Figure 2

SEM micrographs of the selective thermal reflow of grayscale structures in PMMA: a) The stepped contour with five discrete levels (width: 1 μm; step height: ~ 200 nm) was generated in a 1 μm thick resist by local exposure to high energy (100 keV) electrons with doses D1 to D5 and wet development in pure MIBK. The annealing step was performed for 120 min at 110°C (b) and 115°C (c). While for 110°C the step nearest to the unexposed PMMA is still visible, for 120°C it is smoothened out. (scale bars: 1 μm).

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