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Nano Convergence
Figure 3 | Nano Convergence

Figure 3

From: Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers

Figure 3

Schematic flow sequence of the general TASTE method for the generation of asymmetric 3D blazed grating pattern with linear sloped and stepped contours: pre-treatment of selected polymer films, generation of a specific (stepped) topography, local modification of the polymer’s thermo-mechanical properties and thermal treatment for enabling a selective topography equilibration.

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