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Nano Convergence
Figure 6 | Nano Convergence

Figure 6

From: Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers

Figure 6

Simulation results for the EBL flood exposure area in Figure 5 , using the true experimental geometry. The simulation visualizes the time dependent multi-step evolution from the initial shape (t1) to the shape at the end of the reflow (t5) by a ) cross sections and b-d ) 3D surface representations. The highest step is pinned during reflow at the top of the unexposed PMMA part (scale bars: 1 μm).

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