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Table 1 Summary of the GPC and DSC measurements quantifying the dose dependencies of the thermo-mechanical properties of PMMA

From: Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers

Exp. dose [μC cm-2]

Mn [kg mol-1]

Mw[kg mol-1]

PD [-]

Tg [°C]

unexposed

40.0

91.2

2.0

122

27

27.0

58.3

2.2

118

50

18.1

45.2

2.5

116

70

15.3

35.0

2.3

111

85

15.2

34.0

2.2

108

225

7.0

14.6

2.1

100

310

5.5

11.5

2.1

94

360

4.7

10.0

2.1

92

400

4.3

8.9

2.1

90

  1. Upon exposure to high energy electrons, the number averaged molecular weight Mn, weight averaged molecular weight Mw, polydispersity PD (Mw/Mn) and glass transition temperature Tg. is modified according to the applied doses.