Table 3 Parameters of cross-WLF model for PMMA experiment
From: A modified squeeze equation for predicting the filling ratio of nanoimprint lithography
Parameters | Value |
|---|---|
C1 | 31.081 |
C2 (K) | 51.6 |
T0 (K) | 377.15 |
n | 0.3973 |
Ï„ (Pa) | 35,607 |
From: A modified squeeze equation for predicting the filling ratio of nanoimprint lithography
Parameters | Value |
|---|---|
C1 | 31.081 |
C2 (K) | 51.6 |
T0 (K) | 377.15 |
n | 0.3973 |
Ï„ (Pa) | 35,607 |