Fig. 5
FESEM observations of ITO layers by sputtering with reused ITO target dependent on film thickness; a 130 nm, b 180 nm, c 250 nm, and d 350 nm
Fig. 5 | Nano Convergence
FESEM observations of ITO layers by sputtering with reused ITO target dependent on film thickness; a 130 nm, b 180 nm, c 250 nm, and d 350 nm