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Nano Convergence
Fig. 4 | Nano Convergence

Fig. 4

From: Formation of yttria-stabilized zirconia nanotubes by atomic layer deposition toward efficient solid electrolytes

Fig. 4

Fabrication steps for the YSZ-NT array-based MEA. a Preparation of AAO templates. b Deposit the YSZ thin films into the alumina membrane by ALD. c Remove the back-side Al by wet chemical etching. d Partially etching the alumina membrane in order to expose the tube ends. e Sputter porous Pt electrodes onto the top side membrane. f Sputter another porous Pt electrodes on the bottom side

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