Fig. 9From: Innovations in biomedical nanoengineering: nanowell array biosensora–c Height and d–f cross-sectional TM-AFM images of 500-nm patterns of PEGDA575 hydrogel on gold substrates in air. a, d Mold-detached state after being prebaked at 80 °C for 10 min. b, e Molddetached state, and c, f O2 RIE finished state after being prebaked at 100 °C for 10 min [58]Back to article page