Fig. 1

4 types of growth routes for TMDs. a Two-step thermolysis process synthesis from (NH₄)₂MoS₄ precursor on SiO₂/Si or sapphire substrates followed by the two-step annealing process on insulating substrates and finally transferred onto another substrate [39], Copyright 2012, American Chemical Society. b Layer by layer deposition of MoS₂ from MoO₃ by surface sulfurization and transferred to another substrate one by one [45], Copyright 2013, American Chemical Society. c Simple vapor transport method showing MoS₂ films were deposited on insulating substrate at high temperature from MoS₂ powder precursor under inert atmosphere [47], Copyright 2013, American Chemical Society. d (i) LPCVD system setup for TMDs, (ii) Mo–O–S ternary phase diagram illustrating the pathways for the CVD growth of MoS₂ from MoO₃ precursors, and (iii) Possible growth routes of MoS₂ by the reaction of MoO_3−x and S [36]. Copyright 2015, Royal Society of Chemistry