Improved electrical performance of a sol–gel IGZO transistor with high-k Al2O3 gate dielectric achieved by post annealing

Lee, Esther; Kim, Tae Hyeon; Lee, Seung Won; Kim, Jee Hoon; Kim, Jaeun; Jeong, Tae Gun; Ahn, Ji-Hoon; Cho, Byungjin

doi:10.1186/s40580-019-0194-1

Nano Convergence

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Last updated: Wed, 24 Apr 2024 2:49:08 Z

Improved electrical performance of a sol–gel IGZO transistor with high-k Al₂O₃ gate dielectric achieved by post annealing

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