Fig. 2
From: Large area flexible pressure/strain sensors and arrays using nanomaterials and printing techniques
Early silicon based pressure sensor fabricated with MEMS (i) Complete Si wafer based crude design (Reproduced with permission from [7] Copyright 2007, Emerald Publishing Limited) (ii) Etched Si diaphragm (Reproduced with permission from [8] Copyright 2016, Copernicus Publications) (iii) SU-8 supported diaphragm (Reproduced with permission from [8] Copyright 2016, Copernicus Publications) (iv) Carbon Nanotube (CNT) strain gauge based peizoresistive sensor diaphragm (Reproduced with permission from [182] Copyright 2006, American Chemical Society) (v) S shaped diaphragm with piezoresistive material at the groves for improved sensitivity