Fig. 10

Infrared guided-wave nanophotonic physical sensors. a Temperature sensor. Example of simultaneous measurement of solution concentration and temperature using cascaded side-coupled PhC nanobeam cavities (Reproduced with permission from [217]). b Force/Pressure/Displacement sensor: (i) MZI pressure sensor (Reproduced with permission from [228]); (ii) force and displacement sensor using coupled Si microdisk resonator and SiN_x MRR (Reproduced with permission from [232]); (iii) functional AFM detection using optomechanical transducer (Reproduced with permission from [235]). c Accelerometer. Example of optomechanical accelerometer using zipper PhC nanocavity (Reproduced with permission from [236]). d Gyroscope: (i) microresonator Brillouin gyroscope based on Sagnac effect (Reproduced with permission from [241]); (ii) acousto-optic gyroscope (Reproduced with permission from [243]). e Torque/Magnetic field sensor: (i) torque sensor using nanobeam with two 1D PhC nanocavities (Reproduced with permission from [244]); (ii) magnetic field sensor using split-beam nanocavity (Reproduced with permission from [246]); (iii) magnetic field sensor using coupled optical microdisk resonator and arced torsional mechanical resonator (Reproduced with permission from [248])