Fig. 6From: Progress of infrared guided-wave nanophotonic sensors and devicesTypical material platforms for MIR guided-wave nanophotonic biochemical sensors. a Silicon-on-insulator (Reproduced with permission from [145]). b Silicon-on-sapphire (Reproduced with permission from [146]). c Germanium-on-silicon (Reproduced with permission from [147]). d Silicon nitride-on-insulator (Reproduced with permission from [148]). e Aluminum nitride-on-borosilicate (Reproduced with permission from [149]). f Chalcogenide-on-insulator (Reproduced with permission from [150]). g Diamond-on-insulator (Reproduced with permission from [151]). h Mercury cadmium telluride-on-cadmium telluride (Reproduced with permission from [152]). i Gallium arsenide-on-Al0.2Ga0.8As(Reproduced with permission from [153])Back to article page