Fig. 7
From: Progress of infrared guided-wave nanophotonic sensors and devices
Device configurations and system integration of MIR guided-wave nanophotonic biochemical sensors. a Spiral waveguide (Reproduced with permission from [154]). b Pedestal waveguide (Reproduced with permission from [155]). c Slot waveguide (Reproduced with permission from [156]). d Micro-ring resonator (Reproduced with permission from [157]). e Enhancement layer coating (Reproduced with permission from [148]). f Side-trench waveguide (Reproduced with permission from [146]). g Manual liquid drop delivery using glass pipette (Reproduced with permission from [155]). h Tiny gas cell with MIR transparent windows (Reproduced with permission from [158]). i PDMS microfluidic chamber (Reproduced with permission from [159]). j Paper-based microfluidics (Reproduced with permission from [161]. k Integrated thermal emitter as light source (Reproduced with permission from [163]). l Chalcogenide waveguide sensor integrated with PbTe photodetector (Reproduced with permission from [164])