Progress of infrared guided-wave nanophotonic sensors and devices

Ma, Yiming; Dong, Bowei; Lee, Chengkuo

doi:10.1186/s40580-020-00222-x

Nano Convergence

Table 2 Summary of representative absorption-based infrared guided-wave nanophotonic biochemical sensors

From: Progress of infrared guided-wave nanophotonic sensors and devices

Sensor configuration	Improvement strategy	Material platform	Analyte	Working wavelength (nm)	Sensing pathlength (mm)	Sensitivity	LoD	Refs.
Straight ridge waveguide	TM mode	GeSbS on insulator	N-methylaniline	Around 1500	1000	43.3 dB/vol. %	0.07 cm⁻¹ absorption coefficient	[21]
Spiral rib waveguide	N/A	SOI	Glucose	Around 1590	10	N/A	1 mM	[61]
Zigzag ridge waveguide	TM mode	SOI	CH₄	Around 1651	100	N/A	772 ppmv Hz^−1∕2	[62]
Spiral ridge waveguide	TM mode, full integration	SOI	CH₄	Around 1651	300	N/A	92.8 ppmv Hz^−1∕2	[63]
PhC W0.8 waveguide	Slow light effect, slot	SOI	Xylene	Around 1697	0.3	Refer to Fig. 5 in the paper	100 ppbv	[110]
PhC W1.3 waveguide	Slow light effect, slot	SOI	CH₄	Around 1665.5	0.3	N/A	100 ppmv	[111]
Two PhC W1 waveguide	Slow light effect	SOI	Xylene, trichloroethylene (TCE)	Around 1644, around 1674	0.3	N/A	1 ppbv xylene, 10 ppbv TCE	[112]
Microtoroid resonator	Cavity enhancement	SiO₂ on Si	D₂O	1300	N/A	N/A	1 ppmv	[19]
Microdisk resonator	Cavity enhancement	GeSbS on insulator	N-methylaniline	Around 1500	Radius 0.02	N/A	0.02 cm⁻¹ absorption coefficient	[22]
MRR	Cavity enhancement, TM mode	SOI	N-methylaniline	Around 1500	Radius 0.1 (effective free space path length 5 mm)	N/A	2 nl	[41]
Pedestal waveguide	Pedestal waveguide	SNOI	Glucose	2730–3100/3300–3600	8	N/A	150 mg dl⁻³	[137]
Straight ridge waveguide	N/A	SOI	CO₂	4260	20	4 × 10⁻⁶ in transmission	500 ppm	[145]
Straight ridge waveguide	Flexible	AlN on borosilicate	Ethanol, methanol, water	2500–2650	N/A	2% in transmission/1% water	1% water	[149]
Straight ridge waveguide	N/A	Diamond on insulator	Acetone	5780–6350	3	0.13/(mol/l) in absorbance	200 pl	[151]
Straight ridge waveguide	N/A	MCT on CT	Acetone	5780–6350	3	0.023/(mol/l) in absorbance	90 pl/71.1 ng	[152]
Straight SM ridge waveguide	N/A	GOSN	IPA	3650–3900	4	~ 0.0417/vol % in absorbance	5% IPA	[154]
Straight slot waveguide	Slot	Suspended Si	N-bromohexane, IPA, toluene	3100–3400	20	N/A	Chemical tracing limit of 10⁻³ volume ratio	[156]
MRR	Cavity enhancement	SOS	N₂O	4420–4470	Radius 0.12	0.2/ppmv in Q factor	5000 ppmv	[157]
Spiral ridge waveguide	N/A	GeSbS on insulator	CH₄	3310	20	N/A	2.50%	[160]
Straight ridge waveguide	Paper based fluidics	GOS	Bovine serum albumin	5260–10,000	3	0.005/(mg/ml) in absorbance	0.1 mg/ml	[162]
Straight ridge waveguide	Emitter integration	SOI	CO₂	4260	N/A	N/A	10%	[163]
Spiral ridge waveguide	Photodetector integration	GeSbS on insulator	CH₄	3110	1 to 10	0.01/vol % in modal absorption coefficient	1% by volume	[164]
Microdisk resonator	Cavity enhancement	SOCF	Toluene, ethanol, IPA	5140–5260	radius 0.06	N/A	0.05 ng ethanol, 0.06 ng tolune, 0.09 ng IPA	[165]

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