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Fig. 3 | Nano Convergence

Fig. 3

From: Laser digital patterning of conductive electrodes using metal oxide nanomaterials

Fig. 3

a Schematic side view of the excimer laser annealing process and the ZnO NP field-effect transistor structure. S and D indicate the source and drain electrodes, respectively. The top right inset presents a top-view SEM image of transistor electrodes with a layer of deposited ZnO NPs. b Transmission electron microscopy (TEM) image of the ZnO NP film after excimer laser irradiation. The inset shows the diffraction pattern for the marked region. c Room-temperature photoluminescence spectra of the ZnO thin film with and without laser annealing (ac reproduced with permission from Ref. [42]. Copyright Springer, 2009). d Sheet resistance of the ZnO thin film depending on the background gas during laser annealing. e Transmittance of ZnO thin films annealed in background gases with different compositions. f Optical microscope image of 1.5-µm-line width patterns generated on the ZnO thin film (df reproduced with permission from Ref. [44]. Copyright Springer, 2012)

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