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Table 1 Summary of studies on the laser digital patterning process using metal oxide nanomaterials

From: Laser digital patterning of conductive electrodes using metal oxide nanomaterials

Metal oxide

Solvent for NP ink

Laser

Substrate

Electrical properties

Transmittance @ 550 nm

Refs.

ITO

Ethanol

ns, 248 nm

PET

ρ = 1.1 × 10−2 Ω cm

66%

[30]

ITO

Ethanol

cw, 10.6 µm

PET

Rs ~ 400 Ω sq−1 (ρ = 12 × 10−2 Ω cm)

80%

[32]

ITO

Alcoholic solvent

ps, 1.75 µm

PET

Rs ~ 300 Ω sq−1

80%

[33]

ITO

Commercial suspension

cw, 1.5 µm

Glass

Rs ~ 80 Ω sq−1 (ρ = 1.3 × 10−3 Ω cm)

75%

[29]

ZnO

Ethanol, Ethylene glycol

ns, 248 nm

SiO2

R = 3.4 × 104 MΩ → 78 MΩ

[42]

ZnO

1-pentanol

ps, 355 nm

Quartz

Rs ~ 5 kΩ sq−1 (ρ = 4.75 × 10−2 Ω cm)

84%

[44]

ZnO

Methanol, Butyl acetate

cw, 1065 nm

Glass, Na-CMC

ρ = 0.9 × 10−4 Ω cm

[55]

CuO

Ethylene glycol

cw & ns 1070 nm

Glass, PI

ρ = 31 × 10−6 Ω cm

[77]

CuO

IPA

ns, 1070 nm

Glass

ρ = 13 × 10−6 Ω cm

[78]

CuO

Ethylene glycol

ns, 1070 nm

PET

ρ = 30 × 10−6 Ω cm

[81]

CuO/NiO

Ethylene glycol

fs, 780 nm

Glass

[83]

CuO/GO

Water

cw, 405 nm

PET

Rs = 19.6 Ω sq−1

[84]

CuxO

Isopropyl alcohol, Ethylene glycol

cw, 532 nm

Glass

R = over 10 000 Ω → 91 Ω

[85]

NiOx

Toluene

cw, 514.5 nm

Glass, PI

Rs = 655 Ω sq−1 (ρ = 63 × 10−6 Ω cm)

87%

[105]

NiOx

Toluene

cw, 532 nm

Glass

ρ = 103 × 10−6 Ω cm

[108]

NiOx

1-pentanol

cw, 532 nm

Glass, PI, PET

Rs = 53 Ω sq−1 (ρ = 98.8 × 10−6 Ω cm)

84%

[20]

NiOx

1-pentanol

cw, 532 nm

PET

[109]

NiO/Cr

Ethylene glycol

fs, 780 nm

Glass

ρ = 290 Ω cm

 

[110]

  1. ρ resistivity, Rs sheet resistance, R resistance, ns nanosecond, cw continuous-wave, ps picosecond, fs femtosecond