Fig. 1
From: Double-gate thin film transistor with suspended-gate applicable to tactile force sensor
Schematic diagram of process flow for IGZO suspended-gate TFT with an air gap
Fig. 1 | Nano Convergence
From: Double-gate thin film transistor with suspended-gate applicable to tactile force sensor
Schematic diagram of process flow for IGZO suspended-gate TFT with an air gap