Fig. 5
From: Double-gate thin film transistor with suspended-gate applicable to tactile force sensor

a Relationship between the pressure on the gate and displacement of the gate. b Sensitivity of 500 nm Ti suspended-gate at Vg = 60 V, Vd = 1 V
From: Double-gate thin film transistor with suspended-gate applicable to tactile force sensor
a Relationship between the pressure on the gate and displacement of the gate. b Sensitivity of 500 nm Ti suspended-gate at Vg = 60 V, Vd = 1 V