Fig. 1From: Ultrathin MEMS thermoelectric generator with Bi2Te3/(Pt, Au) multilayers and Sb2Te3 legsCross-section SEM images of the multilayer thin films a Bi2Te3/Au, b annealed Bi2Te3/Au, c Bi2Te3/Pt, d Annealed Bi2Te3/Pt. The insets in b and d show the schematic transformation of the Bi2Te3/Au and Bi2Te3/Pt multilayers as a function of the temperature, respectivelyBack to article page