Fig. 3
From: Ultrathin MEMS thermoelectric generator with Bi2Te3/(Pt, Au) multilayers and Sb2Te3 legs
Temperature dependence of the in-plane a electrical conductivity, σ, of the deposited films; bσ of the annealed films; c absolute Seebeck coefficient, |S|, of the deposited films; d |S| of the annealed films