Fig. 5
From: Ultrathin MEMS thermoelectric generator with Bi2Te3/(Pt, Au) multilayers and Sb2Te3 legs
a Photograph of an actual fabricated MEMS device; b SEM image of the local structure in the MEMS device; c SEM cross-sectional view of the cross-plane of the supporting structure; d SEM cross-sectional view of the cross plane of a single thermoelectric leg. The inset shown in c shows the schematic diagram of the TE devices
