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Table 1 Carrier concentration, mobility and TE properties of the annealed films at 303 K

From: Ultrathin MEMS thermoelectric generator with Bi2Te3/(Pt, Au) multilayers and Sb2Te3 legs

Types of filmsSb2Te3Bi2Te3Bi2Te3/Au multilayerBi2Te3/Pt multilayer
Type of carrierHolesElectronsElectronsElectrons
Carrier concentration
[cm−3]
(2.9 ± 0.3) × 1020(1.8 ± 0.2) × 1021(6.8 ± 0.1) × 1021(2.0 ± 0.2) × 1021
Carrier mobility
[cm2 V−1 s−1]
5.7 ± 0.28.77 ± 0.41.5 ± 0.113.2 ± 0.2
Seebeck coefficient
[μV K−1]
148.4 ± 1.062.0 ± 0.355.0 ± 1.1107.05 ± 1.1
Electrical conductivity
[S cm−1]
252 ± 62638 ± 581525 ± 814054 ± 11
Power factor
[μW cm−1 K−2]
5.5 ± 0.610.1 ± 0.44.61 ± 0.746.5 ± 0.5