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Fig. 11 | Nano Convergence

Fig. 11

From: A review on morphotropic phase boundary in fluorite-structure hafnia towards DRAM technology

Fig. 11

Comparison of dielectric constant and crystal phase between RTA and HPA-treated Hafnia, Dielectric constant versus electric field (κ–E) curves for different HZO compositions and thickness with a RTA and b HPA. c and d show the phase transition tendency with thickness and composition of HZO system for RTA and HPA respectively. a and b were reproduced from Ref. [60]

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