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Nano Convergence
Fig. 3 | Nano Convergence

Fig. 3

From: A review on morphotropic phase boundary in fluorite-structure hafnia towards DRAM technology

Fig. 3

Copyright 2015 AIP Publishing LLC

Electrical and materials characteristics of HZO thin film. a Capacitance and b polarization versus voltage curves of HZO thin film with various dielectric behavior at different composition of Zr. c Dielectric constant versus Zr concentration for HZO. d Electrical characteristics and e lattice interaction of each phase depending on Zr concentration at HZO system. d and e were redrawn from [43] and simulation data of atomic structure was reproduced with permission from [41].

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