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Nano Convergence
Fig. 6 | Nano Convergence

Fig. 6

From: A review on morphotropic phase boundary in fluorite-structure hafnia towards DRAM technology

Fig. 6

Structure dependence on HZO thin film. a εr-electric field curves and schematics of HZO with different configuration (Green sphere: Zr, pink: Hf, blue: O). εr and EOT-2Pr PUND (positive up negative down), HZZ represents nano-laminate of HZO-ZrO2. c Energy landscape and d capacitance of different HfO2-ZrO2 structure. (e) Inversed capacitance value with repeated super lattice of HfO2-ZrO2 multi-layer. a and b were redrawn from Ref. [14, 15] respectively. c–e were redrawn from Ref. [16]

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