Fig. 3From: Impact of Pt grain size on ferroelectric properties of zirconium hafnium oxide by chemical solution depositionAFM images of HZO surfaces on various Pt substrates. The information in the inside panels includes scan size, scan rate, and data scale. The surface root-mean-square roughness (RRMS) of the HZO films was approximately 0.5 nm for all samplesBack to article page