Fig. 2From: Grain boundary passivation via balancing feedback of hole barrier modulation in HfO2-x for nanoscale flexible electronicsXPS spectra of HfO2-x thin films in various electrical phases. The fitting results for the Hf 4f spectra of the a conducting, b intermediate, and c insulating states are presented. d The areas of stoichiometric Hf4+ and oxygen-deficient Hfy+ spectra in different states. The inset shows the FWHM of each corresponding deconvoluted spectra. O 1Â s spectra of the e conducting, f intermediate, and g insulating states are also shown. h The areas of lattice oxygen and nonlattice oxygen are in different statesBack to article page