Fig. 1From: Mesoscopic-scale grain formation in HfO2-based ferroelectric thin films and its impact on electrical characteristics(a) Unit cell structures of the monoclinic (m), polar orthorhombic (ferroelectric, f), non-polar orthorhombic (o), and tetragonal (t) phases, (b) Supercell structure with dopants, which is expanded by 2 × 2 × 2 for monoclinic, tetragonal and ferroelectric phases and by 2 × 2 × 1 for non-polar orthorhombic phaseBack to article page