Fig. 9From: Mesoscopic-scale grain formation in HfO2-based ferroelectric thin films and its impact on electrical characteristicsPlan-view TEM images and crystal-orientation color-maps of HZO films (a, b) without and (c, d) with wake-up operation. Inverse polar maps (e) without and (f) with wake-up operation by 103 electrical cyclingBack to article page